anglais)

photolithography [Am ˌfoʊdoʊlɪˈθɑɡrəfi, GB ˌfəʊtə(ʊ)lɪˈθɒɡrəfi] SUBST U

photolithography

fotolitografía f

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photolithography

anglais

The clean room contains the steppers for photolithography, etching, cleaning, doping and dicing machines. en.wikipedia.org

The stamp is produced from the normal techniques of photolithography or electron-beam lithography. en.wikipedia.org

It includes fabrication tools for processes including electron-beam lithography, photolithography, chemical vapor deposition, electron-beam deposition and reactive ion etching. en.wikipedia.org

The most important commercial application of anisotropic etching is in semiconductor chip processing, where photolithography is used to print resist lines on silicon wafers. en.wikipedia.org

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